Emerging Electronic Device
Research Group
YONSEI UNIVERSITY
Embedded Files
Equipment
Equipment
Device Fabrication
Deposition
PEALD
PEALD
3-gun RF Sputter
3-gun RF Sputter
3-gun RF Sputter
3-gun RF Sputter
Lithography
Wet Station
Wet Station
Photo Aligner
Photo Aligner
Etch
ICP-RIE
ICP-RIE
Characterization
ET Analysis system
ET Analysis system
DC, AC Generator
DC, AC Generator
Probe Station
Probe Station
Probe Card
Probe Card
Array Matrix
Array Matrix
Ellipsometery
Ellipsometery
OM
OM
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